Nowadays, with the growing use of AFM (Atomic Force Microscope) nanorobots in the fabrication of nanostructures, research in this area has been proliferated. The major limiting of manipulation process is the lack of real-time observation. Computer simulations have been widely applied to improve the feasibility of the process. The existing 2D strategies are incapable of presenting the feasibility of the process. Therefore, 3D simulations of effective forces during the manipulation process and the control mechanism of the process have been presented in this research, where the effective parameters are investigated. To evaluate the validity of the presented results, a FEM simulation is proposed. It is observed that the two sets of results (the analytical method and the finite element approach) have adequate correlation, while the discrepancy which is in an acceptable range, is due to the different solving technique of the finite element method. By applying the presented models, it is now possible to accurately predict the effective forces for fabricating the nanostructures.

In the present work, characterization of the surface trenches and vacancies with Amplitude Modulation AFM (AM-AFM) using Molecular Dynamics (MD) is simulated and the effects of the tip shape on the resulting images are investigated. The simulated system includes a recently developed gold coated AFM probe which interacts with a sample including a surface trench or a single-atom vacancy. In order to examine the behavior of the above system, including different transition metals, a Molecular Dynamics (MD) simulation with Sutton-Chen (SC) interatomic potential is used. Special attention is dedicated to the study of tip geometry effects such as the tip apex radius, the tip cone angle, the probe tilt angle, the tip apex atoms number, and the tip axis direction with respect to the FCC lattice structure on the resulting images.

With the development of micro and nanotechnology, machining methods at micro and nanoscale have now become interesting research topics. One of the recently-proposed methods for sub-micron machining, especially nanomachining, is dynamic plowing lithography (DPL) method. In this method an oscillating tip is used for machining soft materials such as polymers. The geometry of the oscillating beam and its vibrational properties are the most important parameters in this nanomachining process. In this study, effects of the AFM beam geometry on its stiffness coefficient, resonant frequency, beam stability, and the maximum stress created in the beam structure were investigated for 12 different general shapes using the finite element method. The obtained results indicate that circular and square membranes are the most favourable AFM cantilever geometries because these structures provide higher machining force and speed; while for noisy conditions and environments, straight and V-shaped beams are recommended (because of their higher stability factor) for the DPL nanomachining process.

The abrasive flow machining technique uses a self-deforming tool, an abrasive laden media that is passed back and forth in the passage geometry of the hollow workpiece with the assistance of two hydraulically operated cylinders placed opposite to each other. The material is removed by abrasion generating finer surfaces in the area where flow is restricted. But this method has a low material removal rate. As the time passed, various variants of AFM have been developed by different researchers to increase the productivity and improve the surface finish. Thus a combination of AFM and its process variants were developed to increase material removal rate and surface finish. This article provides a comprehensive review of recent developments in the process variants of AFM and the respective media.