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Information Seminar Paper

Title

DESIGN AND SIMULATION OF A Z-AXIS TORSIONAL CAPACITIVE MEMS ACCELEROMETER

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Abstract

 A NOVEL TORSIONAL SPRING Z-AXIS CAPACITIVE MICRO-ACCELEROMETER IS PROPOSED. IT CONSISTS OF TWO INDEPENDENT TORSIONAL PLATES CROSS LINKED INTER-DIGITALLY. MOVEMENTS OF THE PLATES DUE TO ACCELERATION OR DECELERATION, RESULT IN CAPACITANCE VARIATION OF THE CAPACITORS BETWEEN THE FINGERS. …

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