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Title

DETERMINATION OF MOLYBDENUM THIN FILM SPUTTERING PARAMETERS, AND INVESTIGATION OF THE EFFECT OF MO THIN FILMS DEPOSITION ON FIELD EMISSION PROPERTIES OF SILICON FIELD EMITTER ARRAYS

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Abstract

 MOLYBDENUM (MO) THIN FILMS ARE DEPOSITED USING RF SPUTTERING TECHNIQUE, AND THE EFFECT OF OPERATIONAL PRESSURE AND RF POWER ON RESISTIVITY OF THE FILMS IS INVESTIGATED. POINT OF MINIMUM RESISTIVITY IS SELECTED TO SPUTTER A THIN LAYER OF MO ON TOP OF A PRE-FABRICATED SILICON FIELD EMITTER ARRAY (SI-FEA). GEOMETRIC AND FIELD EMISSION PROPERTIES OF THE ARRAYS ARE INVESTIGATED BEFORE AND AFTER MO DEPOSITION. IT IS SHOWN THAT THE MO COVERED ARRAY SHOWS BETTER EMISSION PROPERTIES AND LOWER TURN ON FIELD, COMPARED TO THE SIMPLE SI-FEA.

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