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Title

COMPASSION OF OPTICAL PROPERTIES OF TWO DIFFERENT STRUCTURES OF ZNO FABRICATED BY RF REACTIVE SPUTTERING

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Abstract

 IN THIS RESEARCH MICRO AND NANO STRUCTURES OF ZINC OXIDE HAVE BEEN PREPARED ON SILICON SUBSTRATES BY RF MAGNETRON SPUTTERING AT TWO DIFFERENT TEMPERATURES. IN THE FIRST EXPERIMENT, IN WHICH THE SILICON SUBSTRATE WAS COVERED WITH A THIN ZN LAYER, AND HOLD IN A TEMPERATURE OF 200OC DURING DEPOSITION, THE STRUCTURES WERE IN THE SHAPE OF NANORODS GROWN VERTICALLY ALIGNED AND CLOSELY PACKED. IN THE SECOND EXPERIMENT THAT THE STRUCTURES WERE GROWN ON THE SILICON SUBSTRATE HOLD AT 100OC, THE PRODUCTS WERE IN THE FORM OF MICRO-RODS WITH CIRCLE CROSS SECTION. COMPARISON OF THE PHOTOLUMINESCENCE SPECTRA SHOWED THAT THE EMISSION OF NANORODS IN GREEN AND BLUE REGIONS IS NEARLY 4.5 TIMES THE EMISSION OF MICRO-RODS.

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