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Title

THE EFFECT OF SUBSTRATE ROTATIONAL SPEEDS ON MORPHOLOGY OF GLAD RF SPUTTERED W NANO-COLUMN THIN FILMS

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Abstract

 IN THIS STUDY, W NANO-COLUMNS WERE PREPARED AT DIFFERENT SUBSTRATE ROTATIONAL SPEEDS USING GLAD-RFSPUTTERING DEPOSITION METHOD. MORPHOLOGICAL CHANGES OF THESE LAYERS WERE INVESTIGATED WITH SEM AND AFM.RESULTS SHOW THAT COLUMNAR STRUCTURE FORMED FOR ALL SAMPLES AND RMS SURFACE ROUGHNESS AND AVERAGE GRAIN SIZE DECREASED WITH INCREASING SUBSTRATE ROTATIONAL SPEEDS. A MINIMUM AVERAGE GRAIN SIZE WAS MEASURED OF ABOUT 58 NM AT 30 RPM.

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