video

sound

Persian Version

View:

127,849

Download:

98,068

Cites:

Information Journal Paper

Title

THE EFFECT OF CORRUGATIONS ON MECHANICAL SENSITIVITY OF DIAPHRAGM FOR MEMS CAPACITIVE MICROPHONE

Author(s)

 TAYBI M. | GANJI B.A.

Pages

  1323-1330

Abstract

 In this paper the effect of corrugations on MECHANICAL SENSITIVITY of diaphragm for MEMS capacitive microphone is investigated. Analytical analyses have been carried out to derive mathematic expression for MECHANICAL SENSITIVITY and displacement of CORRUGATED DIAPHRAGM with RESIDUAL STRESS. It is shown that the MECHANICAL SENSITIVITY and displacement of diaphragm can be modeled using thin plate theory.The mechanical stress of CORRUGATED DIAPHRAGM is calculated using mathematical model and its relationship with RESIDUAL STRESS is expressed. The analytical results show that the MECHANICAL SENSITIVITY of diaphragm can be increased using corrugations, because of reducing the effect of RESIDUAL STRESS in CORRUGATED DIAPHRAGM.

Cites

  • No record.

    • References

  • No record.

    • Cite

    APA: Copy

    TAYBI, M., & GANJI, B.A.. (2013). THE EFFECT OF CORRUGATIONS ON MECHANICAL SENSITIVITY OF DIAPHRAGM FOR MEMS CAPACITIVE MICROPHONE. INTERNATIONAL JOURNAL OF ENGINEERING, 26(11 (TRANSACTIONS B: APPLICATIONS)), 1323-1330. SID. https://sid.ir/paper/628589/en

    Vancouver: Copy

    TAYBI M., GANJI B.A.. THE EFFECT OF CORRUGATIONS ON MECHANICAL SENSITIVITY OF DIAPHRAGM FOR MEMS CAPACITIVE MICROPHONE. INTERNATIONAL JOURNAL OF ENGINEERING[Internet]. 2013;26(11 (TRANSACTIONS B: APPLICATIONS)):1323-1330. Available from: https://sid.ir/paper/628589/en

    IEEE: Copy

    M. TAYBI, and B.A. GANJI, “THE EFFECT OF CORRUGATIONS ON MECHANICAL SENSITIVITY OF DIAPHRAGM FOR MEMS CAPACITIVE MICROPHONE,” INTERNATIONAL JOURNAL OF ENGINEERING, vol. 26, no. 11 (TRANSACTIONS B: APPLICATIONS), pp. 1323–1330, 2013, [Online]. Available: https://sid.ir/paper/628589/en

    Related Journal Papers

  • No record.

    • Related Seminar Papers

  • No record.

    • Related Plans

  • No record.

    • Recommended Workshops