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Information Journal Paper

Title

ENGINEERING MEMS RESONATORS WITH LOW THERMOELASTIC DAMPING

Author(s)

 DUWEL A. | CANDLER R.N. | KENNY T.W.

Pages

  1437-1445

Keywords

Not Registered.

Abstract

 

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    • Cite

    APA: Copy

    DUWEL, A., CANDLER, R.N., & KENNY, T.W.. (2006). ENGINEERING MEMS RESONATORS WITH LOW THERMOELASTIC DAMPING. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 15(6), 1437-1445. SID. https://sid.ir/paper/602233/en

    Vancouver: Copy

    DUWEL A., CANDLER R.N., KENNY T.W.. ENGINEERING MEMS RESONATORS WITH LOW THERMOELASTIC DAMPING. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS[Internet]. 2006;15(6):1437-1445. Available from: https://sid.ir/paper/602233/en

    IEEE: Copy

    A. DUWEL, R.N. CANDLER, and T.W. KENNY, “ENGINEERING MEMS RESONATORS WITH LOW THERMOELASTIC DAMPING,” JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 15, no. 6, pp. 1437–1445, 2006, [Online]. Available: https://sid.ir/paper/602233/en

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