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Information Journal Paper

Title

AFM LITHOGRAPHY OF ALUMINUM FOR FABRICATION OF NANOMECHANICAL SYSTEMS

Author(s)

 DAVIS Z.J. | ABADAL G. | HANSEN O.

Pages

  467-472

Keywords

Not Registered.

Abstract

 

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    APA: Copy

    DAVIS, Z.J., ABADAL, G., & HANSEN, O.. (2003). AFM LITHOGRAPHY OF ALUMINUM FOR FABRICATION OF NANOMECHANICAL SYSTEMS. ULTRAMICROSCOPY, 97(1-4), 467-472. SID. https://sid.ir/paper/597661/en

    Vancouver: Copy

    DAVIS Z.J., ABADAL G., HANSEN O.. AFM LITHOGRAPHY OF ALUMINUM FOR FABRICATION OF NANOMECHANICAL SYSTEMS. ULTRAMICROSCOPY[Internet]. 2003;97(1-4):467-472. Available from: https://sid.ir/paper/597661/en

    IEEE: Copy

    Z.J. DAVIS, G. ABADAL, and O. HANSEN, “AFM LITHOGRAPHY OF ALUMINUM FOR FABRICATION OF NANOMECHANICAL SYSTEMS,” ULTRAMICROSCOPY, vol. 97, no. 1-4, pp. 467–472, 2003, [Online]. Available: https://sid.ir/paper/597661/en

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