“Fabrication of the computerized monitoring system for vacuum coating” project was consisted of study, design and development of different sub-systems. These include (1) a piezoelectric sensor and its flexible cooling holder for vacuum chamber, (2) an oscillator circuit, (3) a frequency meter card, and (4) software for data aqusition and processing and user interface. Finally three sets of this system were produced and put into operation an universities and research centers and are working properly.
The precision of the thickness measurement is one nanometer and it shows the rate of the coating by one nanometer per second precision. Both these two quantities are shown by both graph and column chart in the monitor.
This project is conducted in the High Vacuum R&D Center of ACECR-Sharif branch.
Quartz crystals are fabricated by Iran Electronics Industries.