Paper Information

Title: 

THE EFFECT OF SUBSTRATE ROTATIONAL SPEEDS ON MORPHOLOGY OF GLAD RF SPUTTERED W NANO-COLUMN THIN FILMS

Type: PAPER
Author(s): SHAKER TAYEBEH,MOSHFEGH ALIREZA
 
 
 
Name of Seminar: NATIONAL VACUUM CONFERENCE IRAN
Type of Seminar:  CONFERENCE
Sponsor:  ANJOMANE KHALA IRAN-DANESHGAHE SHAHID BEHESHTI AHVAZ
Date:  2014Volume 6
 
 
Abstract: 

IN THIS STUDY, W NANO-COLUMNS WERE PREPARED AT DIFFERENT SUBSTRATE ROTATIONAL SPEEDS USING GLAD-RFSPUTTERING DEPOSITION METHOD. MORPHOLOGICAL CHANGES OF THESE LAYERS WERE INVESTIGATED WITH SEM AND AFM.
RESULTS SHOW THAT COLUMNAR STRUCTURE FORMED FOR ALL SAMPLES AND RMS SURFACE ROUGHNESS AND AVERAGE GRAIN SIZE DECREASED WITH INCREASING SUBSTRATE ROTATIONAL SPEEDS. A MINIMUM AVERAGE GRAIN SIZE WAS MEASURED OF ABOUT 58 NM AT 30 RPM.

 
Keyword(s): 
 
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