Paper Information

Title: 

THE INVESTIGATION OF SUBSTRATE TEMPERATURE EFFECT ON THE PROPERTIES OF PULSED LASER DEPOSITED DIAMOND-LIKE CARBON THIN FILMS

Type: PAPER
Author(s): MODABBER ASL ALI,KAMELI PARVIZ,RANJBAR MEHDI,SALAMATI HADI
 
 
 
Name of Seminar: NATIONAL VACUUM CONFERENCE IRAN
Type of Seminar:  CONFERENCE
Sponsor:  ANJOMANE KHALA IRAN-DANESHGAHE SHAHID BEHESHTI AHVAZ
Date:  2014Volume 6
 
 
Abstract: 

IN THIS INVESTIGATION DIAMOND-LIKE CARBON (DLC) THIN FILMS HAS BEEN DEPOSITED BY PULSED LASER DEPOSITION AND SUBSTRATE TEMPERATURE EFFECT HAS BEEN STUDID ON THE STRUCTURAL, TOPOGRAPHY AND MORPHOLOGY PROPERTIES OF THE DLC FILMS BY RAMAN SPECTROSCOPY, AFM AND FESEM. THE RAMAN SPECTRA SHOW AN INCREASE IN GRAPHITIC BEHAVIOR AND ORDERING OF THE FILMS WITH INCREASING DEPOSITION TEMPERATURE. A STRUCTURAL TRANSITION FROM AMORPHOUS PHASE TO GRAPHITIC ORDERING PHASE WAS OBSERVED FOR DEPOSITION TEMPERATURE OF 200°C. AFM AND FESEM IMAGE INDICATED THAT THE SURFACE MORPHOLOGY AND ROUGHNESS WAS INFLUENCED BY THE SUBSTRATE TEMPERATURE AND SURFACE ROUGHNESS INCREASED WITH INCREASING DEPOSITION TEMPERATURE.

 
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