Paper Information

Title: 

ANALYSIS OF MICROSTRUCTURE CHANGES OF ZRN FILMS PREPARED WITH ION BEAM SPUTTERING TECHNIQUE ON ANNEALED SS304 UDING XRD AND SEM

Type: PAPER
Author(s): NOROUZIAN SHAHAB,MOJTAHEDZADEH MAJID,AFZALZADEH REZA,NOVINROOZ ABDOLJAVAD,TABRIZI NARGES,DIBAJI HASSAN
 
 
 
Name of Seminar: IRAN PHYSICS CONFERENCE
Type of Seminar:  CONFERENCE
Sponsor:  PHYSICS SOCIETY OF IRAN
Date:  2005Volume -
 
 
Abstract: 

IN THIS WORK, SEM (SCANNING ELECTRON MICROSCOPE) AND XRD (X-RAY DIFFRACTION) ANALYSIS WERE USED TO INVESTIGATE THE EFFECT OF POST- ANNEALING ON THE ZIRCONIUM NITRIDE FILMS MICROSTRUCTURE. ZRN FILMS WERE DEPOSITED ON SS304 (STAINLESS STEEL) USING ION BEAM SPUTTERING TECHNIQUE AT DIFFERENT NITROGEN FLOWS. THEN, THE FILMS WERE ANNEALED IN HYDROGEN ATMOSPHERE AT 800OC FOR 30 MINUTE. IN BOTH AT-DEPOSITE AND ANNEALED LAYERS, ZRN[111] DIRECTION WAS PREFERRED ORIENTATION, BUT THE INTENSITY OF THIS PEAK DECREASED AFTER ANNEALING AS REVEAL BY XRD PATTERNS. A TEXTURE SHIFT TOWARDS THE STANDARD VALUES WAS FOUND AFTER ANNEALING, WHICH SUGGESTS A DECREASE OF STRAIN IN THE POST-ANNEALED ZRN FILMS. SEM MICROGRAPHS PRESENT CLEARLY AN IMPROVEMENT OF FILM SURFACE QUALITY AFTER ANNEALING.

 
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