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Paper Information

Title: 

INVESTIGATION ON RADIATION SPECTRUM FROM LASER PRODUCED SN AND SNO2 PLASMAS

Type: PAPER
Author(s): SOHBATZADEH LONBAR FARSHAD,NISHIMURA HIROAKI
 
 
 
Name of Seminar: IRAN PHYSICS CONFERENCE
Type of Seminar:  CONFERENCE
Sponsor:  PHYSICS SOCIETY OF IRAN
Date:  2005Volume -
 
 
Abstract: 

PROPERTIES OF RADIATION SPECTRUM EMISSION FROM LASER-PRODUCED SN AND SNO2 PLASMAS WERE INVESTIGATED. THE EFFECTS OF LASER ENERGY PULSE, LASER BEAM SPOT SIZE, TIN AND TIN OXIDES DENSITY WERE CONSIDERED ON THE RADIATION EMISSION SPECTRUM. IN THIS PAPER ANGULAR DISTRIBUTION MEASUREMENTS OF THE SPECTRUM WERE CARRIED OUT USING A MONOCHROMATIC EUV CALORIMETER. THE SPECTRUM RANGE 6 NM TO 22 NM WERE INVESTIGATED REGARDING EUV LITHOGRAPHY FOR THE NEXT INTEGRATED CIRCUITS.

 
Keyword(s): 
 
 
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