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Paper Information

Title: 

SIMULTANEOUS IN SITU THICKNESS MONITORING OF THIN FILMS AND DETERMINING THEIR DIELECTRIC PROPERTIES BASED ON MULTIPLE INCIDENT LASERS BEAMS

Type: PAPER
Author(s): ASHRAFI MOHAMMAD REZA,KASHEFIAN ALI,RASHIDIAN BIZHAN
 
 
 
Name of Seminar: NATIONAL VACUUM CONFERENCE IRAN
Type of Seminar:  CONFERENCE
Sponsor:  Industrial sharif University
Date:  2008Volume 3
 
 
Abstract: 

IN THIS PAPER WE REPORT A MEASUREMENT TECHNIQUE FOR SIMULTANEOUSLY DETERMINING COMPLEX DIELECTRIC CONSTANT AND THICKNESS OF ULTRA-THIN FILMS. FOR THIS PURPOSE WE ANALYZE A SET OF REFLECTED AND TRANSMITTED LIGHT INTENSITY EQUATIONS AND OBTAIN REAL AND IMAGINARY PARTS OF THE DIELECTRIC CONSTANT AND THICKNESS OF THE GROWING FILM.
EXPERIMENTAL RESULTS OBTAINED BY A DESIGNED REAL-TIME SYSTEM IS REPORTED FOR ALUMINUM COATING ON GLASS SUBSTRATE AT TWO LASER LIGHT WAVELENGTHS OF 650NM (LIGHT RED) AND 780NM (NEAR INFRARED).

 
Keyword(s): 
 
 
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