Paper Information

Title: 

MOLECULAR DYNAMIC SIMULATION THIN FILM FORMATION IN ICBD

Type: PAPER
Author(s): MIRABBASZADEH K.,NAYEBI P.,SARAMAD SH.,ZAMINPEYMAN E.
 
 
 
Name of Seminar: NATIONAL VACUUM CONFERENCE IRAN
Type of Seminar:  CONFERENCE
Sponsor:  Industrial sharif University
Date:  2008Volume 3
 
 
Abstract: 

ON THE ATOMIC SCALE, MOLECULAR DYNAMIC (MD) SIMULATIONS OF THE IMPACT OF A SINGLE CLUSTER ONTO THE SURFACE HAVE BEEN CARRIED OUT. THE IMPACT OF A NI NAN CLUSTER ON A NI (100) SUBSTRATE WAS STUDIED FOR IMPACT ENERGIES OF 1-20 EV/ATOM. WE INVESTIGATED THE CLUSTER SIZE DEPENDENCE OF THE MAXIMUM SUBSTRATE TEMPERATURE TMAX AND OF THE TIME TMAX WITHIN WHICH THIS TEMPERATURE IS REACHED. TIME, CLUSTER SIZE AND CLUSTER ENERGY DEPENDENCE OF THE NUMBER OF DISORDERED ATOMS IN THE SUBSTRATE WAS OBSERVED. WE ALSO INVESTIGATED THE ENERGY AND CLUSTER SIZE DEPENDENCE OF THE NUMBER OF THE SUBSTRATE SPUTTERING AND IMPLANTATION ATOMS.

 
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