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Paper Information

Title: 

PREPARATION OF TITANIUM THIN FILMS ON GLASS SUBSTRATES BY MAGNETRON AND INVESTIGATION OF THEIR ADHESION TO SUBSTRATE SPUTTERING

Type: PAPER
Author(s): BIDADI HASSAN,PARHIZGAR MOJTABA,HADIAN FARAMARZ,KHODAKARIMI SABA
 
 
 
Name of Seminar: NATIONAL VACUUM CONFERENCE IRAN
Type of Seminar:  CONFERENCE
Sponsor:  Industrial sharif University
Date:  2008Volume 3
 
 
Abstract: 

IN THE PRESENT EXPERIMENTAL WORK, TITANIUM THIN FILMS HAVE BEEN PREPARED ON GLASS SUBSTRATES BY MAGNETRON SPUTTERING AND THE EFFECT OF FOUR IMPORTANT PARAMETERS OF SUBSTRATE TEMPERATURE, ARGON GAS PRESSURE, ION ENERGY AND THE BASE PRESSURE ON THE ADHESION OF TI LAYERS TO SUBSTRATES HAVE BEEN INVESTIGATED. EXPERIMENTAL RESULTS SHOW THAT THE ADHESION OF TI FILMS TO THE GLASS SUBSTRATES IS INCREASED BY INCREASING THE SUBSTRATE TEMPERATURE BUT THE ADHESION IS DECREASED BY INCREASING THE WORKING GAS PRESSURE. INCREASING THE ENERGY OF THE INCIDENT IONS CAUSES THE ADHESION TO ENHANCE. MECHANISMS INVOLVED IN VARIATIONS OF ADHESION BY THE PRESSURE, SUBSTRATE TEMPERATURE AND ENERGY OF THE INCIDENT IONS ARE EXPLAINED.

 
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