Paper Information

Journal:   ESTEGHLAL   September 2003 , Volume 22 , Number 1; Page(s) 167 To 167.
 
Paper: 

METALIZATION OF POLYMERS: COPPER ON CYCLOTENE

 
 
Author(s):  SADOUGH-VANINI A.*
 
* Tehran
 
Abstract: 
Abstract: An analysis of the demands of ULSI and GSI technologies shows the ‎necessity of multi-layer devices to reduction of signal transmission delay time. This ‎reduction is realized by using a better conductor metal, such as Cu and a surrounding ‎insulator with low capacity than actually used, such as Dow Cyclotene 3022. In this ‎paper, the results of evaporated and sputtered Cu to Dow Cyclotene 3022 were ‎studied .After presentation of interfacial reaction that causes adherence; the methods ‎of enhanced adherence as surface modification of polymer by nitrogen plasma have ‎been investigated
 
Keyword(s):  METALIZATION, CYCLOTENE, ADHERENCE, PLASMA, MULTI-LAYE
 
References: 
  • ندارد
 
  Persian Abstract Yearly Visit 65
 
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