Paper Information

Journal:   INTERNATIONAL JOURNAL OF ENGINEERING   AUGUST 2012 , Volume 25 , Number 3 (TRANSACTIONS B: APPLICATIONS); Page(s) 161 To 166.
 
Paper: 

ACCURATE DETERMINATION OF PULL-IN VOLTAGE FOR MEMS CAPACITIVE DEVICES WITH CLAMPED SQUARE DIAPHRAGM

 
 
Author(s):  GANJI B.A.*, MOUSAVI A.
 
* DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING, BABOL UNIVERSITY OF TECHNOLOGY, 484 BABOL, IRAN
 
Abstract: 

Accurate determination of the pull-in, or the collapse voltage is critical in the design process. In this paper an analytical method is presented that provides a more accurate determination of the pull-in voltage for MEMS capacitive devices with clamped square diaphragm. The method incorporates both the linearized modle of the electrostatic force and the nonlinear deflection model of a clamped square diaphragm. The capacitor structure has been designed using a low stress doped poly silicon diaphragm with a proposed thickness of 0.8 mm and an area of 2.4 mm2, an air gap of 3.0 mm, and a 1.0 mm thick back plate. The value of pull-in voltage calculated using equation is about 6.85V and the finite element analysis (FEA) results show that the pull-in occurs at 6.75V. The resulting pull-in voltage and deflection profile of the diaphragm are in close agreement with finite element analysis results.

 
Keyword(s): MEMS, CAPACITIVE DEVICE, PULL-IN VOLTAGE, DIAPHRAGM DEFORMATION
 
References: 
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