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Paper Information

Journal:   JOURNAL OF SOLID MECHANICS   SUMMER 2011 , Volume 3 , Number 3; Page(s) 271 To 282.
 
Paper: 

STUDY OF THERMO ELASTIC DAMPING IN AN ELECTROSTATICALLY DEFLECTED CIRCULAR MICRO-PLATE USING HYPERBOLIC HEAT CONDUCTION MODEL

 
 
Author(s):  REZAZADEH G.*, TAYEFEH REZAEI S., SAEEDI VAHDAT A., NASIRZADEH V.
 
* MECHANICAL ENGINEERING DEPARTMENT, URMIA UNIVERSITY, URMIA, IRAN
 
Abstract: 

Thermo elastic damping (TED) in a circular micro-plate resonator subjected to an electrostatic pressure is studied. The coupled thermo-elastic equations of a capacitive circular micro plate are derived considering hyperbolic heat conduction model and solved by applying Galerkin discretization method. Applying complex-frequency approach to the coupled thermo-elastic equations, TED is obtained for different ambient temperatures. Effects of the geometrical parameters on TED and the critical thickness are investigated. Furthermore, the effect of applied bias DC voltage on TED for an electrostatically deflected micro-plate is also investigated.

 
Keyword(s): MEMS, INTERNAL DAMPING, QUALITY FACTOR, CIRCULAR MICRO-PLATE, ELECTROSTATIC ACTUATION
 
 
References: 
 
Citations: 
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APA: Copy

REZAZADEH, G., & TAYEFEH REZAEI, S., & SAEEDI VAHDAT, A., & NASIRZADEH, V. (2011). STUDY OF THERMO ELASTIC DAMPING IN AN ELECTROSTATICALLY DEFLECTED CIRCULAR MICRO-PLATE USING HYPERBOLIC HEAT CONDUCTION MODEL. JOURNAL OF SOLID MECHANICS, 3(3), 271-282. https://www.sid.ir/en/journal/ViewPaper.aspx?id=273319



Vancouver: Copy

REZAZADEH G., TAYEFEH REZAEI S., SAEEDI VAHDAT A., NASIRZADEH V.. STUDY OF THERMO ELASTIC DAMPING IN AN ELECTROSTATICALLY DEFLECTED CIRCULAR MICRO-PLATE USING HYPERBOLIC HEAT CONDUCTION MODEL. JOURNAL OF SOLID MECHANICS. 2011 [cited 2021July23];3(3):271-282. Available from: https://www.sid.ir/en/journal/ViewPaper.aspx?id=273319



IEEE: Copy

REZAZADEH, G., TAYEFEH REZAEI, S., SAEEDI VAHDAT, A., NASIRZADEH, V., 2011. STUDY OF THERMO ELASTIC DAMPING IN AN ELECTROSTATICALLY DEFLECTED CIRCULAR MICRO-PLATE USING HYPERBOLIC HEAT CONDUCTION MODEL. JOURNAL OF SOLID MECHANICS, [online] 3(3), pp.271-282. Available: https://www.sid.ir/en/journal/ViewPaper.aspx?id=273319.



 
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