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Paper Information

Journal:   INTERNATIONAL JOURNAL OF NANO DIMENSION (IJND)   WINTER 2011 , Volume 1 , Number 3; Page(s) 159 To 175.
 
Paper: 

STUDYING OF VARIOUS NANOLITHOGRAPHY METHODS BYUSING SCANNING PROBE MICROSCOPE

 
 
Author(s):  SADEGH HASSANI S.*, SOBAT Z.
 
* NANOTECHNOLOGY RESEARCH CENTER, RESEARCH INSTITUTE OF PETROLEUM INDUSTRY (RIPI), TEHRAN, IRAN
 
Abstract: 

The Scanning Probe Microscopes (SPMs) based lithographic techniques have been demonstrated as an extremely capable patterning tool. Manipulating surfaces, creating atomic assembly, fabricating chemical patterns, imaging topography and characterizing various mechanical properties of materials in nanometer regime are enabled by this technique. In this paper, a qualified overview of diverse lithographical methods mostly based on making nano-structures is presented.

 
Keyword(s): NANO-LITHOGRAPHY, ATOMIC FORCE MICROSCOPY, SCANNING PROBE LITHOGRAPHY, NANOSTRUCTURE, SURFACE NANO-MODIFICATION
 
References: 
 
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