Paper Information

Journal:   IRANIAN INTERNATIONAL JOURNAL OF SCIENCE   Spring 2000 , Volume 1 , Number 1; Page(s) 79 To 79.
 
Paper: 

PROBE DIAGNOSTICS OF CONFINED PLASMA PRODUCED BY 13.56 MHZ R.F PLASMA SOURCE

 
 
Author(s):  KHORASANI M.*
 
* University of Shahid Beheshti . Tehran . Iran
 
Abstract: 
In an inductively coupled R.F plasma reactor, the plasma density increases smoothly for low increase of input power, but exhibits discontinuities or jumps. Variation of plasma temperature and density has been studied by using both single and double Langmuir probes. Other measurements showed that there is smooth increase in the plasma density, by increasing magnetic coil current and the R.F power. Measurements have also confirmed earlier observations that the higher R.F power strongly depends on, to the higher chamber pressure and plasma potential
 
Keyword(s): PROBE DIAGNOSTICS, CONFINED PLASMA, R.F PLASMA SOURCE
 
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