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Paper Information

Journal:   JOURNAL OF SCIENCES (ISLAMIC AZAD UNIVERSITY)   SPRING 2006 , Volume 16 , Number 59 (PHYSICS ISSUE); Page(s) 23 To 28.
 
Paper: 

FABRICATING TI2ALN NANOLAMINATE BY DC MAGNETRON SPUTTERING

 
 
Author(s):  HANTEHZADEH M.R.*, GOUDARZI S.
 
* PLASMA PHYSICS RESEARCH CENTER, SCIENCE AND RESEARCH CAMPUS, ISLAMIC AZAD UNIVERSITY, TEHRAN, IRAN
 
Abstract: 

We report on the fabrication of Ti2AlN in this article. Thin films of the Mn+1AXn phase ( M: early transition metal; A: A-group element; X: C and/ or N; n=1-3) Ti2AlN were grown on Ti, Si and glass substrate from a Ti and Al compound target with an Ar/N2 gas mixture using DC magnetron sputtering system. X-ray diffraction and atomic force microscopy (AFM) were used to characterize the Ti2AlN (004) structure and morphology of the samples.

 
Keyword(s): TI2ALN, DC MAGNETRON SPUTTERING, NANOLAMINATION, THIN FILMS
 
 
References: 
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Citations: 
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+ Click to Cite.
APA: Copy

HANTEHZADEH, M., & GOUDARZI, S. (2006). FABRICATING TI2ALN NANOLAMINATE BY DC MAGNETRON SPUTTERING. JOURNAL OF SCIENCES (ISLAMIC AZAD UNIVERSITY), 16(59 (PHYSICS ISSUE)), 23-28. https://www.sid.ir/en/journal/ViewPaper.aspx?id=102096



Vancouver: Copy

HANTEHZADEH M.R., GOUDARZI S.. FABRICATING TI2ALN NANOLAMINATE BY DC MAGNETRON SPUTTERING. JOURNAL OF SCIENCES (ISLAMIC AZAD UNIVERSITY). 2006 [cited 2021September25];16(59 (PHYSICS ISSUE)):23-28. Available from: https://www.sid.ir/en/journal/ViewPaper.aspx?id=102096



IEEE: Copy

HANTEHZADEH, M., GOUDARZI, S., 2006. FABRICATING TI2ALN NANOLAMINATE BY DC MAGNETRON SPUTTERING. JOURNAL OF SCIENCES (ISLAMIC AZAD UNIVERSITY), [online] 16(59 (PHYSICS ISSUE)), pp.23-28. Available: https://www.sid.ir/en/journal/ViewPaper.aspx?id=102096.



 
 
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