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Paper Information

Journal:   INDUSTRIAL ENGINEERING & MANAGEMENT SHARIF (SHARIF: ENGINEERING)   SUMMER 2007 , Volume 23 , Number 38; Page(s) 21 To 29.
 
Paper: 

DETECTION OF COMBUSTIBLE GASES BY TIN OXIDE RESISTIVE GAS SENSOR FABRICATED BY ELECTRON BEAM EVAPORATION

 
 
Author(s):  HOSSEINI GOLGOU S.M., HOSSEIN BABAEI F., AFZALZADEH R.
 
* 
 
Abstract: 

SnO2 based thin film resistive gas sensors were assessed by the measurement of their sensitivities to various combustible gases. The gas sensitive thin films were deposited on cold silica substrates in vacuum by electron beam evaporation. The XRD analysis revealed the films to be amorphous. The crystallization of the films was carried out by annealing at 300°C for 140 min. The average particle size of the annealed layers was estimated to be 13 nm. The sample gas sensors were then fabricated by providing two ohmic contacts and the attachment of an electric micro-heater. The sensitivities of the sample resistive gas sensors to methanol, ethanol, propanol and butanol were measured at different concentrations. It was observed that, at low concentration levels, the sensitivity of the sensors increases with the molar mass of the target gas, i.e. at a constant concentration, the sensitivity to methanol was the lowest while that of butanol was the highest. It was also observed, for the first time, that the sensitivity saturation for the gases examined occurs at, approximately, a constant weight concentration, regardless of the molecular weight of the target gas. A model is suggested for the gas-solid interaction mechanism, which describes the results presented.

 
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